【摘 要】
：
The thermal laser separation (TLS) allows the ablation free cleaving to separate solar cells with a high edge quality.The process is based on thermal induced mechanical stress, generated by a well-adj
【机 构】
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3D Micromac AG, Germany Anhalt University of Appl
【出 处】
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SNEC 第九届(2015)国际太阳能产业及光伏工程(上海)论坛
论文部分内容阅读
The thermal laser separation (TLS) allows the ablation free cleaving to separate solar cells with a high edge quality.The process is based on thermal induced mechanical stress, generated by a well-adjusted combination of a laser (heating) and cooling (e.g.by sprayed Di-water).The complete cleaving is a one pass process with a speed up to 300 mm/s.The relative low temperature (no material is ablated or melted) in combination with the high cleaving speed are the reason, that the electrical properties are not influenced by the separation step.TLS is a well investigated process in the semi packaging ([1], [2], [3]).
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