Since Sony realized the commercial applications oflithium ion battery in 1990，many materials forlithium ion battery have been developed. In a lithiumion battery，graphite is used as the anode. Graphitehas good cycling performances but its specificcapacity is low. Tin Was found to have a hightheoretical specific capacity，which reaches990mAh/g. However tin suffers severe volumevariations during electrochemical reactions withlithium ions，which results in heavy body stress ofanode materials during charging/discharging andfinally capacity fades.capacity fades. This drawback limits the practical application of tin as the anode of lithium ion battery. In this work，direct current magnetron sputtering(DCMS)was used to fabricate tin thin film on Cu foil substrate. Themorphology，the composition and thickness and the cycling performance of the prepared tin thin filmwere characterized by scanning electron microscopy(SEM)，X-ray diffraction(XRD)，inductively coupledatomic emission spectrometry(ICP)arid galvanostatic charge/ discharge(GC)measurements.