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本文讨论了扫描电镜中频闪系统的设计要求和计算方法,介绍了我们的实验系统。采用高能电子束轰击InGaAs二极管,根据所产生的脉冲束感生电流信号判断已获得宽度小于5毫微秒的脉冲电子束。
This article discusses the design requirements and calculation methods of strobe system in SEM, and introduces our experimental system. A high-energy electron beam is used to bombard an InGaAs diode. Based on the resulting pulsed beam induced current signal, it is determined that a pulsed electron beam having a width of less than 5 nanoseconds has been obtained.