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Design and Simulation of a Z-axis Dual Proof Mass Micromachined Gyroscope with Decoupled Oscillation
【机 构】
:
Pen-Tung Sah MEMS Research Center,Xiamen University,Fujian Province,CHINA
【出 处】
:
中国微米纳米技术学会第十届学术年会暨第一届国际会议(1st International Conference of th
【发表日期】
:
2008年12期
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