NONINVASIVE MEASUREMENTS OF NANOMETER THICKNESS USING MICROWAVE RESONATORS

来源 :第二届微波/太赫兹科学与应用国际研讨会(2013 International Symposium on Microwav | 被引量 : 0次 | 上传用户:wmf_china
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Metal-film thicknesses ranging from several nanometers up to one micrometer were measured noninvasively using centimeter-wavelength microwaves.This method is based on the reflection of microwaves at the interface between the metal and substrate, and the fact that the intrinsic surface resistance of electrical conductors is equal to the intrinsic surface reactance in the local limit.
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