【摘 要】
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Nb-doped titanium dioxide(TNO)thin films were fabricated by aerosol deposition(AD).The AD is a novel technique for fabricating ceramic films at room tempera
【机 构】
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Graduate School of Science and Engineering,Doshisha University,Kyotanabe,Japan
【出 处】
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The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会)
论文部分内容阅读
Nb-doped titanium dioxide(TNO)thin films were fabricated by aerosol deposition(AD).The AD is a novel technique for fabricating ceramic films at room temperature.Particles in the aerosol are pulverized by collisions with a substrate.Consequently,a film can be deposited with a high deposition rate.This phenomenon is known as Room-Temperature Impact Consolidation(RTIC).To prepare for raw materials for AD,TNO bulks were fabricated by sintering the pressed powder mixture of TiO,anatase-TiO2,Ti2O3 and Nb2O5 for 30 min at 700℃ or for 300 min at 1100℃ in air.The mixing ratio of powder mixture was 8.5,77,8.5 and 6 wt%,respectively.
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