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  5. A New Method for Depth Profiling of Nanometer Thin Layer

A New Method for Depth Profiling of Nanometer Thin Layer

来源 :6th Asia-Pacific Winter Conference on Plasma Spectrochemistr | 被引量 : 0次 | 上传用户：ZXX198811
【摘 要】
：
　　For depth profile analysis of nanometer layers,classical methods such as secondary ion mass spectrometry(SIMS)and X-ray photoelectron spectroscopy(XPS)are r
【作 者】
：
Xiaoling Cheng Weifeng Li Wei Hang Benli Huang 
【机 构】
：
DepartmentofChemistryandtheMOEKeyLabofSpectrochemicalAnalysis&Instrumentation,CollegeofChemistryandC
【出 处】
：
6th Asia-Pacific Winter Conference on Plasma Spectrochemistr
【发表日期】
：
2015年5期
【关键词】
：
Depth profile analysis Nanometer thin layer Micro-discharge 
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　　For depth profile analysis of nanometer layers,classical methods such as secondary ion mass spectrometry(SIMS)and X-ray photoelectron spectroscopy(XPS)are restrict because of strict requirements for pressure condition.Atmospheric-pressure(AP)discharge was an attractive choice due to its convenient operation and low equipment cost.
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