CrN thin films,which have been used as hard coating materials for cutting tools,plastic metal molds and friction parts,exhibit high hardness,excellent oxidation resistance and chemical stability.Recently,multi-component Cr-Me-N coatings,Me is metal elements such as Al,Si,have been explored in order to improve the properties of CrN coatings.Not only metal addition but also nonmetal addition to CrN coatings,the hardness and oxidation resistance improved by substitution of oxygen atoms for nitrogen atoms in CrN has been reported [1]o Cr(N,O) is thought to be a material with O atoms substituted for some of the N atoms of CrN,in other words,it is believed to be a solid solution of CrN and CrO,although CrO is an unstable material at standard state and its existence has not been confirmed.We anticipate that it is possible to synthesis Cr-Me-N-O (Me; Mg,Cu,Mn,Ni and Cu) phase,which are dissolving the MeO into CrN in order to stabilize the chemical bonding of Cr-O,and the hardness of Cr-Me-N-O coatings is harder than Cr-Me-N and Cr-N-O coatings.