Development of Polymer-Derived SiAlCN Ceramics for Wireless Passive Pressure Sensor Application in H

来源 :The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会) | 被引量 : 0次 | 上传用户:uan998
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  Polymer derived ceramic(PDC)possesses unique properties of excellent oxidation/corrosion resistance,outstanding high temperature stability and multifunctionality which makes it good candidate of micro-sensor in high temperature and harsh environment,such as turbine engines,national defense and energy generation fields.Polymer derived SiAlCN ceramic was synthesized by thermal decomposition of pre-ceramic precursor.
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