Diamond like Carbon (DLC) films are really the general term of a serials of carbon films, which is, consist of sp2 and sp3 carbon bonds with or without Hydrogen ingredient. They can offer a wide range of exceptional properties determined by the variation of deposition parameters and methods[1]. Hydrogen-free carbon films obtained by cathodic vacuum arc evaporation (CAVE) usually provide very high hardness, while hydrogenated carbon films prepared by some PVD or CVD methods by using hydrocarbon as the carbon source usually have very low friction coefficient[2,3]. The CAVE method is known as its high ionization rate due to the high active arc plasma. If hydrocarbon gases were fed in during the CAVE process as the second carbon source, the hydrocarbon may be decomposed and it may be helpful in the carbon films formation. Thus, it could be expected to obtain coatings with special properties.