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Magnetic storage hard disk drives (HDDs) have been used widely to provide storage of digital information in modern computer systems and consumer electronic products.Hard disk substrates play a key role in the data storage process of HDDs.However, a potential failure mode exists to the head burnish induced clearance requirements by variation induced by substrate nanoasperities.Developing a polish process to eliminate surface asperities and residual surface defects on the glass substrate is therefore a necessity to meet the challenges of future technology.Three distinct diamonds of A, B and C were utilized in this study.The major difference among these three distinct cluster diamond types is the diamond percentage.The differing diamond percentage content in turn induced a different structure and changed the polish properties.HRTEM, XPS,Raman, BET, AFM, Optical Surface Analyzer and disk defect tester were used for the diamond particles, polished substrate and disk analysis.Based on analysis results, the percentage of crystalline diamond in A, B and C solutions is 90%, 80% and 70%, respectively.A, B and C diamond particles exhibited an average primary crystalline size of 8, 6 and 6 nm.The C graphite/diamond ratio is 4.45 which is higher than that of B (3.29) and A (2.88).The C slurry generates relatively smaller Ra as compared to A and B.This is due to the lower diamond percentage with smaller particle density and higher particle surface area in C.Its lower polish penetration depth causes a smoother polish surface, which in turn reduces surface scratches thus improving the disk quality.On the other hand, all of the three slurries show similar polish stock removal amounts.