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原子层沉积方法生长ZnO(100)薄膜
【机 构】
:
武汉大学物理科学与技术学院,人工微结构教育部重点实验室
【出 处】
:
中国物理学会2011年秋季学术会议
【发表日期】
:
2011年9期
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