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Herein, we present a new approach called hyperthermal hydrogen induced cross-linking (HHIC) technology to enhance the water vapor barrier Property of Parylene C (PC) film by cross-linking its surface.AFM, FTIR and water vapor transmittance tester were used to characterize the microstructure and the water vapor barrier properties of PC film.The results show that the water vapor transmittance of HHIC treated PC film associates with the voltage and HHIC treatment time.After HHIC treatment (voltage of 100 v and the treatment time of 5 min), the water vapor transmittance of PC film decreased by about 75%.