论文部分内容阅读
The Parameter Measurement of Low-Temperature Low-Pressure Plasma Based on Langmuir Probe
【机 构】
:
Vacuum and Fluid Engineering Research Centre, Northeastern University, Shenyang 110004, P.R.China
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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