Magnetron plasma-fabricated bioactive titania films for biomedical application

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:cuibo1000
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TiO2 films with different anatase/rutile phase composition and nanocrystal size were fabricated by using DC magnetron sputtering deposition on unheated substrates.
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