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Plasma-Enhanced and Thermal CVD of Metal Oxide Nanostructures:Growth,and Device Applications
【机 构】
:
Chair, Inorganic and Materials Chemistry, Department of Chemistry, University of Cologne, Greinstr.6
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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