A Strong Blocking Layer Of Graphene For Copper Diffusion Barrier

来源 :2015台湾物理年会 | 被引量 : 0次 | 上传用户:yinje2004_2005
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  Graphene has attracted much interest because of its extraordinary electric and thermal conduction,mechanical strength and optical transparency and its potential applications in various fields,such as interconnect,flexible electronic,high frequency device,solar cell.Large area and high quality graphene has been synthesized by chemical vapor deposition(CVD)using copper and transition metals as catalyst.
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