论文部分内容阅读
An analytical model of ion energy distribution and angular distribution in dual frequency capacitive
【机 构】
:
SchoolofPhysicsandOptoelectronicTechnology,DalianUniversityofTechnology,116024,Dalian,China
【出 处】
:
9th Asia-Pacific Conference on Plasma Science and Technology
【发表日期】
:
2008年10期
其他文献
Optical Emission Spectroscopy (OES) Diagnosis of Acetone Species in Intermediate Frequency Argon Pla
会议
Understanding the dynamic behavior of a helium atmospheric pressure microplasma jet using temporal-s
会议
会议
Plasma gas composition effect on the metal surface cleaning using atmospheric pressure microwave pla
会议
Investigated on rotational and vibrational temperature of nitrogen gas and ion in dual frequency cap
By using optical emission spectroscopy (OES), the vibrational and rotational temperatures of N(+2) and N2 in dual frequency (41/2 MHz) capacitively coupled
会议