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双源气溶胶辅助化学气相沉积法制备Al掺杂ZnO薄膜
【机 构】
：
燕山大学环境与化学工程学院,秦皇岛,066004
【出 处】
：
第十三届固态化学与无机合成学术会议
【发表日期】
：
2014年期
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