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本文设计了具有类椭圆函数非对称响应的太赫兹窄带带通滤波器。滤波器由两个椭圆柱形谐振腔组成,并采用侧壁激励的方式,中心频率分别在0.88THz和1.041THz。鉴于传统机械加工工艺已经无法满足该频段滤波器的加工要求,硅基微机械加工工艺被用来完成两个滤波器的加工工作。使用商用全波电磁仿真软件Ansoft HFSS仿真,结果显示滤波器相对带宽分别为0.77%和0.75%。本文设计的滤波器具有结构简单,紧凑,易于加工等优势。文中还对微机械工艺可能对滤波器性能带来的影响进行了分析。
In this paper, a terahertz narrowband bandpass filter with an elliptic function-like asymmetric response is designed. The filter consists of two elliptical cylindrical resonators and uses side-wall excitation with center frequencies of 0.88 THz and 1.041 THz, respectively. In view of the traditional mechanical processing technology has been unable to meet the processing requirements of the band filter, silicon-based micromachining process is used to complete the two filter processing. Using the commercial full-wave electromagnetic simulation software Ansoft HFSS simulation, the results show that the relative bandwidth of the filter is 0.77% and 0.75% respectively. This design of the filter has the advantages of simple structure, compact, easy to process. The paper also analyzes the possible influence of micromachining process on the filter performance.