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微波等离子体化学气相沉积(MPCVD)技术被认为是制备高质量金刚石膜的一种最重要的技术手段。但是金刚石膜制备技术的失衡造成了目前国内高品质金刚石膜制备技术水平处于停滞状态,致使国内对高品质金刚石膜的迫切需要一直得不到满足。为此,文章主要通过HFSS软件对椭圆谐振腔式的微波等离子体的CVD装置进行设计及对主要尺寸进行优化,并通过相同条件下与圆柱谐振腔式的CVD装置的对比,得出了椭圆谐振腔式微波等离子体CVD装置优于圆柱谐振腔式CVD装置这个结论。
Microwave plasma chemical vapor deposition (MPCVD) technology is considered as one of the most important technical means for preparing high quality diamond films. However, the unbalanced diamond film preparation technology has caused the current domestic high-quality diamond film preparation technology at a standstill, resulting in the urgent need for high-quality diamond film has been unsatisfied. Therefore, the HFSS software is mainly used to design and optimize the main dimensions of the elliptical resonator microwave plasma CVD apparatus. By comparing with the cylindrical resonator CVD apparatus under the same conditions, the thesis obtains the elliptical resonance Cavity microwave plasma CVD devices outperform cylindrical resonant CVD devices.