Nanostructures and nanostructured materials have been attempted to be used on the next-generation solar cells by providing efficient tunable optical absorption and charge separation.[1,2] Effectively absorbing light in the active layer within limited thickness is particularly important due to currently insufficient light absorption in thin film solar cells.Different kinds of nanostructures have been widely proposed to induce the free incident light to transfer into guide modes along the active layer for efficient absorption within thin film solar cells,such as plasmonic structure or photonic crystal nanostructures.[3,4] In this work,the self-assembled ZnO hollow dielectric nanosphere structure was used as whispering gallery mode (WGM) resonators to trap the sunlight for absorption enhancement in silicon thin film solar cells.The ZnO HNS arrays were fabricated using self-assembled monolayer polystyrene (PS) nanospheres as the template with low cost and high throughput.Absorption enhancement in the silicon solar cells has been demonstrated after integrating the ZnO HNS structure on the top of a device.Short circuit current density of the thin film silicon solar cell with a 250 nm thick amorphous silicon active layer can be improved to 22.80 mA/cm2 by a 10% enhancement when decorating this optimized self-assembled transparent conductive oxide (TCO) HNS arrays as transparent conductive dielectric layer,compared with 20.65 mA/cm2 in the device configurated with a single AZO anti-reflection layer.