International regulations define methods for the analysis of dissolved or particular bound elements in waters(groundwater,surface water,drinking water,wastewater etc.).Total reflection X-ray fluorescence(TXRF)analysis is not yet an accredited analytical method for wastewaters,but the quantitative detection of Hg,As,Cd,Cr,Ni,Pb and other elements in comparison with ICP-OES/MS was published recently.During the last decades TXRF has been proven as a flexible and easy-to-operate technology for the detection of trace elements.The sample has to be applied as a thin film on a reflective carrier,which reduces any matrix effect significantly.The sample is then excited by monochromatic X-ray radiation in a flat angle below the critical angle of reflection.The sample amount required is in the range of ?g or ?l,respectively.Full quantification is possible through addition of an internal standard element of known concentration.This paper demonstrates the use of TXRF for trace element analysis of various environmental sample types like sludge,wastewaters,leachates and run-offs from industrial processes.The straightforward and fast sample preparation of this analytical technology during routine processes will be highlighted.Typical measuring data and detection limits of waters from cement,petro and metal-working industries will be shown.We conclude that TXRF is a suitable chemical analysis method to fulfill legal regulations and standards.