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In this presentation,I will introduce our efforts on nanoscale exploration of ultrathin silicon oxides and nanobelts by scanning probe microscopy and other techniques in several major aspects.Firstly,I will show a systematical study of ultrathin silicon oxide on silicon (SiO2/Si) by in-situ ultrahigh vacuum scanning tunneling microscopy/spectroscopy (UHVSTM/STS).Special attention will be paid to the energy band gap variations,electronic resonant tunneling,thermal decomposition of SiO2/Si.Secondly,I will show a nanoscale study on CdS nanobelt devices with photo-assist scanning surface potential microscopy (SSPM).