Microelectromechanical systems (MEMS) devices are manufactured using similar microfabrication techniques as those used to create integrated circuits.They often have moving components that allow a physical or analytical function to be performed by the device in addition to their electrical functions.Although MEMS can be aseptically fabricated and hermetically sealed,biocompatibility of the component materials is a key issue for MEMS used in vivo.Interest in MEMS for biological applications (BioMEMS) is growing rapidly,with opportunities in areas such as biosensors,and drug delivery.The BioMENS applications in Taiwan are blooming particularly in drug delivery,medical technology (SOC,system-on-chip),and medical device developments (artificial retina,artificial nose).