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  5. Detecting the Micro-defects in the GaAs Material by Time Resolved Emissions

Detecting the Micro-defects in the GaAs Material by Time Resolved Emissions

来源 :International Conference on Nanoscience & Technology,China 2 | 被引量 : 0次 | 上传用户：xiaoyuerhaha
【摘 要】
：
The GaAs material is one of important semiconductor materials, it has wide applications in the design and manufacturing of semiconductor apparatus.In the manufacturing process of GaAs material, many t
【作 者】
：
Ling Chen Zhongliang Pan Guangzhao Zhang 
【机 构】
：
School of Physics and Telecommunications Engineering,South China Normal University,Guangzhou 510006,
【出 处】
：
International Conference on Nanoscience & Technology,China 2
【发表日期】
：
2013年3期
【关键词】
：
Micro-defects GaAs material semiconductor material defect detection time resolve 
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　　The GaAs material is one of important semiconductor materials, it has wide applications in the design and manufacturing of semiconductor apparatus.In the manufacturing process of GaAs material, many types of defects may be introduced into the material.The defects in GaAs are especially critical in determining the properties of devices, especially the micro-defects in GaAs.
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