Triple-Junction Solar Cells with Microcrystalline Silicon Bottom Cell on Large-Area Glass Substrates

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:arsonloupeen
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We report on an a-Si∶H/a-SiGe∶H/μc-Si∶H triple-junction p-i-n solar cells deposited on large-area glass substrates.Microcrystalline silicon (μc-Si∶H) bottom cells were deposited with a VHF-PECVD deposition system.
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