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研究了一种偏振移相Fizeau干涉仪,以中心波长为650nm的多纵模半导体激光器作为光源,利用光源短相干特性和一套偏振延迟装置分出一对偏振方向正交参考光和测试光,采用巴比列-索列尔补偿器作为偏振移相器,采集四幅移相干涉图按照传统移相算法图,测试了一块平行平板的前表面面形。PV值为0.0682λ,RMS值为0.0127λ。该方法的优点是移相精度高,移相时无须推动参考镜,可适用于大口径系统的干涉测试,同时消除了多表面干涉杂散条纹的影响。
A polarization phase shift Fizeau interferometer is studied. A multi-longitudinal mode semiconductor laser with a center wavelength of 650 nm is used as a light source to separate a pair of orthogonal reference light and test light in the polarization direction by using a light source’s short coherence property and a set of polarization delay devices, Using the Barbie-Sorel compensator as a polarization phase shifter, four phase-shifted interferograms are acquired. According to the traditional phase shift algorithm, the front surface of a parallel plate is tested. The PV value is 0.0682λ and the RMS value is 0.0127λ. The method has the advantages of high phase shift accuracy, no need to push the reference mirror during phase shifting, and is suitable for interference testing of large-caliber systems and eliminates the influence of multi-surface interference stray fringes.