Study for Si Quantum Dot Structures Using Hyperthermal Neutral beam

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:meimei5211314
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Silicon (Si) quantum dot materials have been proposed for third generation solar cells.In this work,quantum dots were formatting in amorphous on glass and p-type crystal Si substrates by the hyperthermal neutral beam (HNB) formation method with a gas mixture of SiH4,He,and Ar.
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