Bactericidal Action of the Reactive Species Produced by Gas-Discharge Nonthermal Plasma at Low Press

来源 :9th Asia-Pacific Conference on Plasma Science and Technology | 被引量 : 0次 | 上传用户:along0429
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The Si3N4 nanopowder was prepared by means of ICPECVD by decomposing of Sill4 and N2.The ion density in the reaction chamber was diagnosed by a Langrnuir probe.Analysis by FT-IR, TEM and XRD reveals t
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