FINITE ELEMENT MODELLING OF ATOMIC FORCE MICROSCOPE CANTILEVERS WITH UNCERTAINTY IN MATERIAL AND DIM

来源 :第三届非线性力学最新进展国际会议Third International Conference on Recent Adv | 被引量 : 0次 | 上传用户:qq452723692
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  Atomic Force Microscopes (AFMs) have been widely used for scanning measurement at micron and nano scales.A micro-cantilever with a sharp probe at its free end is a key component of an AFM.It works in a similar way to a gramophone stylus.While the probe scans the surface of a sample, the contact force between the probe tip and the sample surface leads to a small elastic deflection of the micro-cantilever: The deflection is measured by reflecting a laser beam on the top surface of the cantilever to a position-sensitive photodetector which records the movement of the reflected laser beam.By converting the signal generated, a topographic image of the samples surface is generated.
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