Design and performance of,the transverse rotating magnetic field steered arc source used in vacuum a

来源 :第四届国际表面与界面科学与工程学术会议(The Fourth International Conference on S | 被引量 : 0次 | 上传用户:jsj19871027
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  In our design,the concept of static magnetic field is given up and the idea of controlling the arc discharge by transverse rotating magnetic field (TRMF) is put forward.The TRMF in this article is produced by stationary three-phase windings carrying three-phase alternating currents without any visible physical rotation.Through changing the frequency and the amplitude of the exciting current (these two parameters can be adjusted independently),the speed of rotation and the magnetic intensity can be regulated continuously.Based on the physical mechanism of the cathode spot discharge and the general<(j) × (b)>current drive schemeby TRMF,the behavior of cathode spot in TRMF was discussed.At low frequency,the cathode spot moves in a certain direction,called retrograde motion.The velocity of the retrograde motion increases with the amplitude of the alternating current connected with the magnetic intensity.With increasing the frequency of TRMF,the cathode spot split to a group of fine spot lines and expand on the cathode surface.When the increase of the frequency and the strength of TRMF over the critical value,the arc discharge changes mode from the multiple cathode spot discharge to a distributed discharge mode.In this mode of operation the arc discharge covers the entire cathode instead of being confined to cathode spots,and there is a resultant drop in the current density.The reduction of the power density results in the reduction.of MPs.The high utilization of the targets is achieved due to the homogenous arc discharge covered the entire cathode surface.We believe this design is a new-type arc source and it will bring inspiration and great interest in the PVD domain.
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