论文部分内容阅读
Research of Novel Magnetic Filtered Cathodic Arc Deposition System with Rectangular Arc Plasma Sourc
【机 构】
:
Department 702, School of Mechanical Engineering and Automation, Beihang University, Beijing, China
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年3期
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