【摘 要】
：
Since 1992 Professor Zhuangde Jiang has led Institute of Precision Engineering (IPE) of Xian Jiaotong University to investigate relevant MEMS (Micro Electro Mec
【机 构】
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HecurrentlyisthevicepresidentofXi’anJiaotongUniversity(XJTU)andthedirectorofInstituteofPrecisionEngi
【出 处】
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2012传感器与MEMS技术产业化国际研讨会
论文部分内容阅读
Since 1992 Professor Zhuangde Jiang has led Institute of Precision Engineering (IPE) of Xian Jiaotong University to investigate relevant MEMS (Micro Electro Mechanical Systems) sensor technology research. This report mainly introduces the progresses which IPE has achieved over nearly last two decades in MEMS sensor technology, including MEMS pressure sensor, MEMS acceleration sensor, MEMS gas sensor, MEMS viscosity & density sensor, MEMS PCR (Polymerase Chain Reaction) chip and MEMS integrated sensor, and so on.
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