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Aluminum surface modification by plasma thermal diffusion of fluorine ions
【机 构】
:
Cheorwon Plasma Research Institute, 288 Jipo-ri, Galmal-eup, Cheorwon-gun, Ganwon-do, 269-802, Korea
【出 处】
:
9th Asia-Pacific Conference on Plasma Science and Technology
【发表日期】
:
2008年1期
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