【摘 要】
：
Reactive magnetron sputtering technique was used to gain titanium nitride (TiN) films on W18Cr4V high-speed steel and GCr15 bearing steel substrates at low temperature.In order to ensure substrates in
【机 构】
：
Reliability Engineering Institute,Wuhan University of Technology,Wuhan 430063,China
【出 处】
：
Fifth International Conference on Surface Engineering(第五届表面工
论文部分内容阅读
Reactive magnetron sputtering technique was used to gain titanium nitride (TiN) films on W18Cr4V high-speed steel and GCr15 bearing steel substrates at low temperature.In order to ensure substrates in a state of low temperature all the time during deposition,radio-frequency power were controlled less than 130 W,and a special-designed nickel chromium triangle nisiloy type thermocouple unit was used to measure the temperature during deposition.The technical process of TiN films are as follows:anode ion etching (-1200 V,10 min),advance deposition Ti (argon flow rate was 2.08× 10-6kg/s,VDC=180 V,Ubias=0 V,10min).deposition TiN (argon flow rate was 2.08× 10-6 kg/s,nitrogen flow rate was 4.17×10-8 kg/s,VDc=180 V,Ubias=-30 V,100~120 min).
其他文献
he preparation of multi-layer composition gradient hard thin films on titanium aluminide was realized with a renovated arc ion plating equipment where pure titanium and aluminum separated targets had
HVOF thermal spraying tests were carried out for thermal spraying the coatings with two kinds of cermets powders,which are microstructured Sulzer Metco Diamalloy 2004 WC-12%Co powders and nanostructur
The coatings for elevated temperature erosion resistance in circulating fluidized bed (CFB) boilers were made by high velocity arc spraying process and CrB powder wire.The microstructure and phase of
PVD hard coating on various steels are well known for providing surfaces with enhanced tribological properties in terms of low friction and high wear resistance.However,their tribological performance
Thermal barrier coatings (TBCs) on the superalloy turbine blades can lower the temperature of metallic substrate by 100-300 ℃,allowing an increase in the turbine entry temperature.These coatings are g
The magnetic field distribution of the unbalance magnetron sputtering could be changed to extend the plasma area and to impose the ions to bombard the films,for that get excellent quality films.In thi
As one of the laser host materials,Nd:YVO4 has been paid more and more attention due to its features,i.e.,low lasing threshold,large absorption coefficient and high slope efficiency,which are suitable
Investigation of diamond film synthesized by chemical vapor deposition (CVD) has still attracted much attention for its outstanding properties.It would be firstly proposed to deposit spherical diamond
Heterogeneous nucleation is very important for the formation of dropwise condensation,and it is directly related to the surface properties of materials.It is therefore necessary to study the relation
TiN/carbon multilayer coatings were deposited on M2 and GCr15 wafers by ion beam assistant magnetron spurting deposition (IBMSD).The hardness,elastic modulus,fracture toughness,adhesion strength and t