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  5. Photoluminescence of Silicon Quantum Dots

Photoluminescence of Silicon Quantum Dots

来源 :IUPAC 9th International Conference on Novel Materials and th | 被引量 : 0次 | 上传用户：lxlhenhao
【摘 要】
：
In this work, silicon quantum dots (QDs) in silicon nitride/silicon supedattice structures (SN/Si-SLs) were fabricated on the silicon substrates with different deposition times of silicon by low press
【作 者】
：
Shu-Fen Hu Tzu-Wen Lin Din-Ping Tsai Ru-Shi Liu 
【机 构】
：
Department of Physics, National Taiwan Normal University, Taipei, 116, Taiwan
【出 处】
：
IUPAC 9th International Conference on Novel Materials and th
【发表日期】
：
2013年2期
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论文部分内容阅读
In this work, silicon quantum dots (QDs) in silicon nitride/silicon supedattice structures (SN/Si-SLs) were fabricated on the silicon substrates with different deposition times of silicon by low pressure chemical vapor deposition system.Transmission electron micrographs demonstrated that silicon QDs were formed in SN/Si-SLs.
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