【摘 要】
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A multiscale simulator for alumina film growth inside a nanoporous material during atomic layer deposition (ALD) will be presented.The model combines a cont
【机 构】
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University of Maryland,USA
【出 处】
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The 5th Sino-US joint Conference of Chemical Engineering(第五届
论文部分内容阅读
A multiscale simulator for alumina film growth inside a nanoporous material during atomic layer deposition (ALD) will be presented.The model combines a continuum description of precursor gas transport inside a nanopore during exposure to each of the two precursor species (trimethyaluminum and water) with a Monte Carlo (MC) simulation of the film growth on the microscopic scale.Simulation results are presented for both the MC simulation and for the multiscale system, the latter illustrating how nonuiform deposition along the nanopore can occur when insufficient precursor exposure levels are used.
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