Today,the orientation and location detection of the underwater acoustic target have made smaller-size and higher-sensitivity vector hydrophones urgently needed.Since 2002,with the research foundation for the MEMS technology at North University of China,and as well as the support of the National Natural Science Foundation of China project,Navy Equipment Pre-research project,Pre-research Foundation of CPLA General Equipment Department project,Basic R&D Project of Committee,and the National Technology Research and Development program ("863"program),etc.,we have carried out several researches,such as the sensitive structure based on nano-film quantum effect,bionic vector hydrophone,sound-transparent and water-tightness package technology,signal extraction and process technology.On the studies at the last years,a kind of sensitive method on meso-piezoresistance effect has been developed to solve the problem of low-sensitivity; cilia-type bionic microstructure has been developed to realize the vector detection; a novel micro-nano fabrication technology has been developed to realize consistency and batch production.The MEMS bionic vector hydrophone manufactured by our group,having self-owned intellectual property,has the advantages of smaller size,better low-frequency characteristic,higher sensitivity,possesses good directional pattern in the form of "8" shape,and the receiving sensitivity is up to-180dB.It can realize remote detection in a small platform,and has been applied in different fields,as well as has broad application prospects.On the basis of a previously developed MEMS bionic vector hydrophone,we further study the three-dimensional bionic vector hydrophone,the underwater imaging device on a chip and marine energy collector for submarine sensor network,and have obtained some research achievements.