The Langmiur Probe and Optical Emission Spectroscopy Diagnostics of Dual-frequency Capacitively

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:aiqinghua5223
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
Dual-frequency capacitively coupled plasmas (DF-CCPs) have attracted the attention of many authors in recent years.DF-CCPs are used to achieve independent control of ion flux and ion bombardment energy onto the substrate.
其他文献
A series of materials once used as the protective layer in plasma display panels (PDPs) have been explored,such as MgO,MgF2,Al2O3,CsI,Cs2O,Si3N4 and TiO2,which can exhibit relatively low firing voltag
Due to some challenges for the diagnosis of langmuir probe in reactive plasmas,microwave based probe techniques are now being better developed.
Downstream oxygen plasma is no longer applicable in stripping photoresist coated on low-k dielectric layers,where oxygen is known to degrade low-k dielectric films,and hydrogen based plasma begins to
A two-dimensional profile evolution of a Si trench is simulated in a radio frequency capacitively coupled plasma (rf-CCP) with a hybrid model by considering sputtering,ion-enhanced etching and deposit
Cold atmospheric pressure plasma jets (CAPPJs) have recently attracted growing interest,motivated by their considerable application potentials for material processing and biomedical applications.
Optical emission spectroscopy combined with a Langmuir probe measurement was conducted in inductively coupled rf 13.56 MHz O2-Ar discharges under the pressures in the range of 1 - 30 mTorr and the app
The plasma nonuniformity is study by using optical emission spectroscopy (OES) to measure the intensity profiles of Ar line (750.4nm) along the vertical and radial axes in 2MHz,13.56MHz and 41MHz CCP.
Linear ion sources (LIS) have attractive interests in surface vacuum coating technologies.The LIS emitted ions from a low energy (<100 eV) to a high energy (>700 eV).
A two-dimensional particle-in-cell method is adopted to investigate the dynamic polarization and stopping power for an ion beam propagating through a two-component plasma,which is simultaneously irrad
Dielectric barrier discharge (DBD) plasma is widely used in environmental pollution control.The plasma contains various active species (high energy electrons,ions,radicals and O3 etc.),which can react