论文部分内容阅读
Problems of aspheric surface measurement using capacitive probes
【机 构】
：
Xi'anJiaotongUniversityChina
【出 处】
：
2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议
【发表日期】
：
2016年10期
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