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纳米图形蓝宝石衬底上MOCVD外延生长AlN
【机 构】
:
中国科学院半导体研究所,北京市海淀区清华东路甲35号100083中国科学院力学研究所,北京市海淀区北四环路15号100190
【出 处】
:
第十二届全国MOCVD学术会议
【发表日期】
:
2012年4期
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