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5. Optical metrology beyond the diffraction limitA review

Optical metrology beyond the diffraction limitA review

来源 :第十七届全国光学测试学术交流会 | 被引量 : 0次 | 上传用户：wish_hjl

【摘 要】

：

　　Infamous phrase *Diffraction limit is not indeed a real barricade except in the case of localization and far-field precision.The diffraction barricade can b

【作 者】

：

RAMZAN ULLAH XIANGZHAO WANG 

【机 构】

：

LaboratoryofInformationOpticsandOptoelectronicTechnology,ShanghaiInstituteofOpticsandFineMechanics,C

【出 处】

：

第十七届全国光学测试学术交流会

【发表日期】

：

2018年8期

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论文部分内容阅读

　　Infamous phrase *Diffraction limit is not indeed a real barricade except in the case of localization and far-field precision.The diffraction barricade can be bypassed by using astute approaches.

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