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Recently many thin film PV manufactures chose to build their own production lines by integrating various types of single tools,instead of buying a turnkey solution,in order to reduce the initial investment and increase the flexibility of selecting single step processing tools,thus optimizing the performance of each process step.This is due to an increasing competition on the international solar markets and therefore key parameters such as cost and efficiency,as well as flexible product design,become more and more important.Furthermore,in many cases a PV manufacturer has developed its own key equipment for depositing absorbing layer,which has the potential of achieving high efficiency and low cost production of PV modules.To make the module production process complete,equipment for remaining process steps in the production line is needed.Therefore,availability of high quality and reliable equipment for the whole range of single process step plays a key role in the success of self integrating scheme to build a thin film PV production line.Besides the processing tools which provide functional layer (such as TCO and absorbing layers) and its processing (such as laser scribing and wet cleaning),metrology tools and line automation are also essential to successfully build a PV production line.In this presentation the author will introduce Manzs solution to help PV manufacturers building their own thin film PV production lines by self-integration scheme.The presentation includes Manzs laser scribing and laser edge ablation tools,inline and off line metrology tools,wet cleaning and wet chemical etching tools,PVD tools as well as line automation.With the whole range of thin film single step equipment and automation line from Manz,a potential customer can easily combine its own key equipment with Manzs tools for the remaining process steps and therefore successfully build the complete thin film PV production line.Besides the guarantee of high performance due to field proven high quality and reliability of Manzs single equipment and automation line,the potential customer will have the benefit of easy project management and therefore fast success since Manz is the only equipment provider the customer needs to deal with.