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研究了基于AlGaN/GaN异质结材料的肖特基二极管气体传感器对于体积分数为2×10-4～10-3的CO气体的响应状况。在2V正向偏压下,器件对于低至体积分数2×10-4的CO仍表现出了明显的响应(电流增大0.7mA),随着CO体积分数的升高,器件的电流变化愈加明显,但在反向偏压下,通入CO气体对器件的电流大小无明显影响。对器件在不同体积分数CO下的灵敏度与外加偏压的关系也进行了研究,在正向偏压下,器件的灵敏度随着CO体积分数的升高而增大。当CO气体撤消时,器件表现出了迅速的恢复性能,2V的恒定电压下,器件的恢复速度约为3mA/min。
The response of Schottky diode gas sensors based on AlGaN / GaN heterojunction materials to CO gas with a volume fraction of 2 × 10-4 ~ 10-3 was investigated. Under forward bias voltage of 2V, the device still shows obvious response to CO of 2 × 10-4 (0.7mA increase of current). With the increase of CO volume fraction, the device current changes more Obviously, however, under reverse bias, the introduction of CO gas has no significant effect on the current of the device. The relationship between the device sensitivity and applied bias at different volume fractions of CO has also been investigated. Under forward bias, the sensitivity of the device increases with increasing CO volume fraction. When the CO gas is withdrawn, the device shows a rapid recovery performance, the constant voltage of 2V, the device recovery rate of about 3mA / min.