【摘 要】
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Background, Motivation and Objective AT-cut quartz resonators utilizing the thickness shear mode (TSM) are used widely as frequency reference in an electronic system. The boundary condition of a quart
【机 构】
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Department of Mechanical Engineering, Tatung University, Taiwan
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Background, Motivation and Objective AT-cut quartz resonators utilizing the thickness shear mode (TSM) are used widely as frequency reference in an electronic system. The boundary condition of a quartz plate affects tremendously the TSM characteristics. For example, the unwanted flexure and loss would be induced by the anchors, which attach the quartz plate to the substrate. To improve the attachment effects, a quartz plate with beveled edge was proposed. The literatures show the steeper the bevel slope, the better the confinement of the TSM energy. However, more beveling makes the excitation weaker and cost larger. Phononic crystals are synthetic structures with periodic variation of elastic property and may give rise to acoustic band gaps. A phononic crystal with band gaps forbids any acoustic wave propagation within the frequency ranges of the band gaps. In this paper, phononic crystals are utilized for trapping acoustic energy and reducing anchor loss in AT-cut quartz resonators.
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