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A model of three-dimensional Cu sculptured thin films on Cu (100) substrates is established by Kinetic Monte Carlo (KMC) method.Some detailed diffusion events are proposed in the model, including the surface diffusion as well as the mass transport between intedayers.The latter involves the direct diffusion down to the nearest hollow sites, the diffusion descend to the vacant kink sites and the vacant step sites, whose relevant Ehflich-Schwoebel barrier is set respectively.The shadowing effect is considered due to the glancing angle deposition (GLAD) and overhangs are allowed during the deposition.We also perform the finite-difference time-domain simulations (FDTD) to calculate the normal incidence transmission properties of Cu quasi-periodic nanostructures.