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The problem of the devastation of fluid-flow machinery components is very complex,because it consists of processes of erosion and corrosion.The most dangerous factor is the cavitation phenomenon,which is very difficult to eliminate through the use of design solutions.Usage of materials with greater resistance to cavitation erosion seems to be an obvious effective method of prevention.Ceramic materials may be considered as reasonable candidates for this purpose.In the presented work,cavitation erosion resistance of oxide phases as well as silicon carbide and silicon nitride was presented and compared.The mechanisms of damage were described and compared.