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利用超声雾化热解沉积技术(USP)在不同温度的玻璃和电气石衬底上生长纳米ZnO薄膜.Raman和XRD结果表明晶体为六方纤锌矿多晶结构,衬底温度越高,Raman特征峰越强,晶体结晶性能越好,晶粒尺寸越大,C轴择优取向生长越明显.
衬底温度对电气石/ZnO薄膜的结构,形貌和光学特性的影响
【摘 要】
：
利用超声雾化热解沉积技术(USP)在不同温度的玻璃和电气石衬底上生长纳米ZnO薄膜.Raman和XRD结果表明晶体为六方纤锌矿多晶结构,衬底温度越高,Raman特征峰越强,晶体结晶性能越好,晶粒尺寸越大,C轴择优取向生长越明显.
【机 构】
：
上海大学材料学院电子信息材料系,上海,200444
【出 处】
：
2014中国功能材料科技与产业高层论坛
【发表日期】
：
2014年2期
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