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Two group porous silicon (PS) samples were treated by rapid thermal oxidation (RTO) and electrochemical oxidation (ECO),respectively.
Influence of Oxidation Treatment on Ballistic Electron Surface-emitting Display of Porous Silicon
【摘 要】
：
Two group porous silicon (PS) samples were treated by rapid thermal oxidation (RTO) and electrochemical oxidation (ECO),respectively.
【机 构】
：
Xi'an Jiaotong University, Key Laboratory of Physical Electronics and Devices of the Ministry of Ed
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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